The main partner in the field of research related to the EUV plasma.

Cooperation partner in the project CP3E, aimed at the study of photonic and plasma-induced processes on the surface of the EUV optics.

The main partner in the development of metrology equipment for EUV optics.

Partner for cooperation in research of the chemical composition of plasma and plasma-surface interaction.

Partner in the theoretical study of the radiative properties of dense plasma.

Institute of Spectroscopy of the Russian Academy of Sciences ( ISAN ) was established in 1968 on the basis of laboratory spectroscopy Commission as part of the Division of General Physics and Astronomy of the USSR Academy of Sciences .