EUV Lithography

Extreme ultraviolet radiation is currently one of the most intensively researched areas of the electromagnetic spectrum. This is due to the transition in microelectronics manufacturing processes for this range. It is a process of production of microchips, metrology (inspection of photomasks) microscopy.
The main work in this area focused on the development of elements of optical systems, light sources, detectors, plasma diagnostics systems, etc.


Sources of radiation

Our company is engaged in the development and improvement of laser and plasma sources of radiation. Significant experience in this field. The general direction of work in this area - the coverage of new wavelengths, increasing the power and the spectral brightness of the radiation, the use of innovative technology to create light sources.

Spectrometers, Detectors and Sensors

The study, diagnosis, and monitoring of various processes (eg, plasma diagnostics), require the development of specialized spectrometers and detectors. Our company has developed specialized spectrometers and detectors for monitoring UV radiation, X-rays, ion detector. Sensors are being developed for the complex gas mixtures (e.g., determination of water content for natural gas) and materials.


Numerical simulation

modResearch and development of new processes and technologies in most cases require detailed modeling. "RnD-ISAN" uses methods of numerical simulation (computer simulation) for the description and optimization of the processes occurring in plasma sources of radiation, interaction of radiation with the surface behavior of liquids and gases in different environments.
The complexity of the study and developed processes require simultaneous account of the large number of significantly different physical phenomena. Most commercially available software packages and development environment is not comprehensive enough to address specific problems or have a partial model. To solve such problems requires the creation of a unique numerical models describing the conditions and characteristics of specific tasks.
Among RnD-ISAN models are developed directly in the process of joint work of theoretical and experimental groups. This allows you to evaluate the applicability of the model experimentally measure many physical parameters necessary unknown. This approach not only improves the quality of the results of numerical modeling, but also to create a more accurate model of the processes.